Technical Program
Session 4: Advanced Circuit Modeling and Heterostructure Simulation
Session 5: AC Analysis of Device Performances
Session 6: Atomistic Modeling and Fluctuation Simulation
Session 7: Numerics and Algorithm
Session 11: Process Modeling II
Session 12: Quantum Transport Modeling
Session 1: Plenary Session (Intl.
Conference Hall)
Chairpersons: R.W. Dutton, Stanford Univ.
M. Miura-Mattausch, Hiroshima
Univ.
|
9:00 |
Opening
and Welcome Remarks S. Odanaka, Osaka Univ. |
|
9:10 1-1 |
Plenary:
What is Interesting Now and Future in Microscopic Carrier
Transport ? T. Ando Tokyo
Inst. of Technol., Japan |
|
9:55 1-2 |
Plenary:
Integrated TCAD and ECAD Solutions - A Paradigm Shift S.-W. Lee Intel,
USA |
|
10:40 1-3 |
Plenary:
Coupled-Field Modeling of Microdevices and Microsystems G. Wachutka Technische
Univ. Muenchen, Germany |
11:25 Lunch
Session 2: Physical Modeling (Intl.
Conference Hall)
Chairpersons: H. Oka, Fujitsu Labs.
P.
Oldiges, IBM
|
12:45 2-1 |
Surface
Mobility in Silicon at Large Operating Temperature (Invited) G. Baccarani Univ.
of Bologna, Italy |
|
13:20 2-2 |
Simulation
of DGSOI MOSFETs with a Schrodinger-Poisson Based Mobility Model A. Schenk and A. Wettstein* Swiss
Fed. Inst. of Technol. and *Integrated Systems Eng., Switzerland |
|
13:40 2-3 |
Ensemble
Monte Carlo/Molecular Dynamics Simulation of Inversion Layer Mobility in Si
MOSFETs -Effects of Substrate Impurity Y. Kamakura, H. Ryouke and K.
Taniguchi Osaka
Univ., Japan |
|
14:00 2-4 |
Investigation
of the Electron Mobility in Strained Si1-xGex at
High Ge Composition S. Smirnov, H. Kosina and S.
Selberherr Technical
Univ. Vienna, Austria |
14:20 Break
Session 3: TCAD Applications (Intl.
Conference Hall)
Chairpersons: Y. Oda, Matsushita
S.-W.
Lee, Intel
|
14:35 3-1 |
A
Strategy for Enabling Predictive TCAD in Development of Sub 100nm CMOS
Technologies (Invited) C. Machala, S. Chakravarthi,
D. Li*, S.-H. Yang and C. Chidambaram Texas
Instruments and *University of Texas, USA |
|
15:10 3-2 |
On
the Optimal Shape and Location of Silicided Source and Drain Contacts P. Oldiges, C. Murthy, X.
Wang, S. Fung and R. Purtell IBM,
USA |
|
15:30 3-3 |
GIDL
Simulation and Optimization for 0.13ƒÊm/1.5V Low Power CMOS Transistor Design S. Zhao, S. Tang, M.
Nandakumar, D.B. Scott, S. Sridhar, A. Chatterjee, Y. Kim, S.-H.
Yang, S.-C. Ai and S.P. Ashburn Texas
Instruments, USA |
|
15:50 3-4 |
TCAD
Driven Drain Engineering for Hot Carrier Reduction of 3.3V I/O PMOSFET N. Miura, H. Hayashi, H.
Komatsubara, M. Mochizuki and K. Fukuda Oki
Electric, Japan |
16:10 Break
Session 4: Advanced Circuit Modeling and
Heterostructure
Simulation (Intl. Conference Hall)
Chairpersons: S. Ho, Hitachi
N. Goldsman, Univ. of Maryland
|
16:25 4-1 |
Circuit-Simulation Model of Gate-Drain-Capacitance Changes in Small-Size MOSFETs Due to High Channel-Field Gradients D. Navarro, K. Hisamitsu, T.
Yamaoka, M. Tanaka, H. Kawano, H. Ueno, M.
Miura-Mattausch, H.J. Mattausch, S. Kumashiro*, T. Yamaguchi*,
K. Yamashita* and N. Nakayama* Hiroshima
Univ. and *STARC, Japan |
|
16:45 4-2 |
2D Simulation of a Buried-Heterostructure Tunable Twin-Guide DFB Laser
Diode L. Schneider, A. Witzig, A.
Bregy, B. Schmidt*, M. Streiff, M. Pfeiffer and W. Fichtner ETH
Zurich and *Nortel Networks Optical Components, Switzerland |
|
17:05 4-3 |
A
Comprehensive Simulation Study on Strained-Si/SiGe nMODFET Scaling for RF
Applications Q.C. Ouyang, S.J. Koester,
J.O. Chu, A. Grill, S. Subbanna and D.A. Herman Jr. IBM,
USA |
|
17:25 4-4 |
Realistic
Scaling Scenario for Sub-100nm Embedded SRAM Based on 3-Dimensional
Interconnect Simulation Y. Tsukamoto, T. Kunikiyo, K.
Nii, H. Makino, S. Iwade, K. Ishikawa and Y. Inoue Mitsubishi
Electric, Japan |
18:15 Reception (Reception Hall)
(Intl. Conference Hall)
Chairpersons: G. Wachutka, Technische Univ. Muenchen
C.
Diaz, TSMC
|
9:00 5-1 |
On
the Large-Signal CMOS Modeling and Parameter Extraction for RF Applications
(Invited) M. Je, I. Kwon, J. Han, H.
Shin and K. Lee KAIST,
Korea |
|
9:35 5-2 |
Drift-Diffusion-Based
Modeling of the Non-Quasistatic Small-Signal Response for RF-MOSFET Applications S. Jinbou, H. Ueno, H.
Kawano, K. Morikawa, N. Nakayama, M. Miura-Mattausch and H.J.
Mattausch Hiroshima
Univ., Japan |
|
9:55 5-3 |
The
Physical Phenomena Responsible for Excess Noise in Short-Channel MOS Devices R. Navid and R.W. Dutton Stanford
Univ., USA |
|
10:15 5-4 |
Simulation
of Substrate Currents W. Schoenmaker, P. Meuris, W.
Magnus and B. Maleszka IMEC,
Belgium |
10:35 Break
Session 6: Atomistic Modeling and Fluctuation Simulation
(Intl. Conference Hall)
Chairpersons: M. Hane, NEC
S.
Dunham, Univ. of Washington
|
10:50 6-1 |
Multiscale
Simulation of Diffusion, Deactivation, and Segregation of Dopants
- Ab-Initio to Continuum (Invited) W. Windl Ohio
State Univ., USA |
|
11:25 6-2 |
Integrated
Atomistic Process and Device Simulation of Decananometre MOSFETs A. Asenov, M. Jaraiz*, S.
Roy, G. Roy, F. Adamu-Lema, A.R. Brown, V. Moroz** and R.
Gafiteanu** Univ.
of Glasgow, UK, *Univ. de Valladolid, Spain and **Avant!,
USA |
|
11:45 6-3 |
3D
MOSFET Simulation Considering Long-Range Coulomb Potential Effects for
Analyzing Statistical Dopant-Induced Fluctuations Associated with Atomistic
Process Simulator T. Ezaki, T. Ikezawa, A.
Notsu, K. Tanaka and M. Hane NEC,
Japan |
|
12:05 6-4 |
Transistor
Width Dependence of LER Degradation to CMOS Device Characteristics J. Wu, J. Chen and K. Liu Texas
Instruments, USA |
12:25 Lunch
Session 7: Numerics and Algorithm (Intl. Conference Hall)
Chairpersons: M. Kimura, Sony
P.
Leon, Mixed Technology Associates
|
13:40 7-1 |
Enhanced
Advancing Front Delaunay Meshing in TCAD P. Fleischmann and S. Selberherr Technical
Univ. Vienna, Austria |
|
14:00 7-2 |
In-Advance
CPU Time Analysis for Monte Carlo Device Simulations C. Jungemann and B.
Meinerzhagen Univ.
of Bremen, Germany |
|
14:20 7-3 |
An
Efficient Algorithm for 3D Interconnect Capacitance Extraction Considering
Floating Conductors O. Cueto, F. Charlet and A.
Farcy* CEA
and *STMicroelectronics, France |
14:40 Break
Session 8: MEMS and ESD (Intl. Conference Hall)
Chairpersons: T. Toyabe, Toyo Univ.
W.
Schoenmaker, IMEC
|
14:55 8-1 |
System
Level Model of Damping Effects for Highly Perforated Torsional Structures G. Schrag, R. Sattler and G.
Wachutka Munich
Univ. of Technol., Germany |
|
15:15 8-2 |
A
Novel CDM-Like Discharge Effect During Human Body Model (HBM) ESD Stress V. Axelrad, Y. Huh*, J.W.
Chen* and P. Bendix* Sequoia
Design Systems and *LSI Logic, USA |
|
15:35 8-3 |
Simulation
Technique of Heating by Contact Resistance for ESD Protection Device K. Matsuzawa, H. Kawashima,
T. Matsuhashi and S. Yasuda Toshiba,
Japan |
16:15-18:15 Poster Session (Room 401, 4F)
P-1 Atomistic Simulation of RTA Annealing for
Shallow
Junction
Formation Characterizing both BED and TED
M.
Yu, R. Huang, X. Zhang, Y. Wang and H. Oka*
Peking Univ., China and *Fujitsu Labs.,
Japan
P-2 Direct Tunneling Gate Current in Deep Sub-Micron
MOSFETs
in the Presence of Inelastic Scattering
A.
Haque, K. Alam and S. Zaman
Bangladesh Univ. of Eng. and Technol.,
Bangladesh
P-3 Three-Dimensional Triangle-Based Simulation
of Etching Processes
O.
Lenhart and E. Bar
Fraunhofer Inst. of Integrated Circuits,
Germany
P-4 Automatic Order Reduction of
Thermo-Electric Model for
Microthrusters
Ignition Unit
T.
Bechtold, E.B. Rudnyi and J.G. Korvink
Univ. of Freiburg, Germany
P-5 Numerical Modeling of Silicon Film
Deposition in Very-
High-Frequency
Plasma Reactor
K.
Satake, Y. Kobayashi and S. Morita
&nbs