Technical Program

Session 1: Plenary Session

Session 2: Physical Modeling

Session 3: TCAD Applications

Session 4: Advanced Circuit Modeling and Heterostructure Simulation

Session 5: AC Analysis of Device Performances

Session 6: Atomistic Modeling and Fluctuation Simulation

Session 7: Numerics and Algorithm

Session 8: MEMS and ESD

Session 9: Process Modeling I

Session 10: Device Modeling

Session 11: Process Modeling II

Session 12: Quantum Transport Modeling

Poster Session

Panel Discussion

                             

Wednesday, September 4

 

Session 1:           Plenary Session (Intl. Conference Hall)

Chairpersons:              R.W. Dutton, Stanford Univ.
                                  M. Miura-Mattausch, Hiroshima Univ.

 

9:00

Opening and Welcome Remarks

S. Odanaka, Osaka Univ.

 

9:10

1-1

Plenary: What is Interesting Now and Future in Microscopic

Carrier Transport ?

T. Ando

Tokyo Inst. of Technol., Japan

 

9:55

1-2

Plenary: Integrated TCAD and ECAD Solutions - A Paradigm Shift

S.-W. Lee

Intel, USA

 

10:40

1-3

Plenary: Coupled-Field Modeling of Microdevices and Microsystems

G. Wachutka

Technische Univ. Muenchen, Germany

 

11:25              Lunch

 

Session 2:           Physical Modeling (Intl. Conference Hall)

Chairpersons:              H. Oka, Fujitsu Labs.

                                  P. Oldiges, IBM

 

12:45

2-1

Surface Mobility in Silicon at Large Operating Temperature (Invited)

G. Baccarani

Univ. of Bologna, Italy

 

13:20

2-2

Simulation of DGSOI MOSFETs with a Schrodinger-Poisson Based Mobility Model

A. Schenk and A. Wettstein*

Swiss Fed. Inst. of Technol. and *Integrated Systems Eng.,

Switzerland

 

13:40

2-3

Ensemble Monte Carlo/Molecular Dynamics Simulation of Inversion Layer Mobility in Si MOSFETs -Effects of Substrate Impurity

Y. Kamakura, H. Ryouke and K. Taniguchi

Osaka Univ., Japan

 

14:00

2-4

Investigation of the Electron Mobility in Strained Si1-xGex

at High Ge Composition

S. Smirnov, H. Kosina and S. Selberherr

Technical Univ. Vienna, Austria

 

 

14:20              Break

 

Session 3:           TCAD Applications (Intl. Conference Hall)

Chairpersons:              Y. Oda, Matsushita

                                  S.-W. Lee, Intel

 

14:35

3-1

A Strategy for Enabling Predictive TCAD in Development of Sub 100nm CMOS Technologies (Invited)

C. Machala, S. Chakravarthi, D. Li*, S.-H. Yang and

C. Chidambaram

Texas Instruments and *University of Texas, USA

 

15:10

3-2

On the Optimal Shape and Location of Silicided Source and Drain Contacts

P. Oldiges, C. Murthy, X. Wang, S. Fung and R. Purtell

IBM, USA

 

15:30

3-3

GIDL Simulation and Optimization for 0.13ƒÊm/1.5V Low Power CMOS Transistor Design

S. Zhao, S. Tang, M. Nandakumar, D.B. Scott, S. Sridhar,

A. Chatterjee, Y. Kim, S.-H. Yang, S.-C. Ai and S.P. Ashburn

Texas Instruments, USA

 

15:50

3-4

TCAD Driven Drain Engineering for Hot Carrier Reduction of 3.3V I/O PMOSFET

N. Miura, H. Hayashi, H. Komatsubara, M. Mochizuki and

K. Fukuda

Oki Electric, Japan

 

16:10              Break

 

Session 4:           Advanced Circuit Modeling and Heterostructure

                                 Simulation (Intl. Conference Hall)

Chairpersons:              S. Ho, Hitachi

                                N. Goldsman, Univ. of Maryland

 

16:25

4-1

Circuit-Simulation Model of Gate-Drain-Capacitance Changes in Small-Size MOSFETs Due to High Channel-Field Gradients

D. Navarro, K. Hisamitsu, T. Yamaoka, M. Tanaka,

H. Kawano, H. Ueno, M. Miura-Mattausch, H.J. Mattausch,

S. Kumashiro*, T. Yamaguchi*, K. Yamashita* and

N. Nakayama*

Hiroshima Univ. and *STARC, Japan

 

16:45

4-2

2D Simulation of a Buried-Heterostructure Tunable Twin-Guide DFB Laser Diode

L. Schneider, A. Witzig, A. Bregy, B. Schmidt*, M. Streiff,

M. Pfeiffer and W. Fichtner

ETH Zurich and *Nortel Networks Optical Components,

Switzerland

 

17:05

4-3

A Comprehensive Simulation Study on Strained-Si/SiGe nMODFET Scaling for RF Applications

Q.C. Ouyang, S.J. Koester, J.O. Chu, A. Grill, S. Subbanna

and D.A. Herman Jr.

IBM, USA

 

17:25

4-4

Realistic Scaling Scenario for Sub-100nm Embedded SRAM Based on 3-Dimensional Interconnect Simulation

Y. Tsukamoto, T. Kunikiyo, K. Nii, H. Makino, S. Iwade,

K. Ishikawa and Y. Inoue

Mitsubishi Electric, Japan

 

18:15              Reception (Reception Hall)

 

Thursday, September 5

 

Session 5:           AC Analysis of Device Performances

                                 (Intl. Conference Hall)

Chairpersons:              G. Wachutka, Technische Univ. Muenchen

                                 C. Diaz, TSMC

 

9:00

5-1

On the Large-Signal CMOS Modeling and Parameter Extraction for RF Applications (Invited)

M. Je, I. Kwon, J. Han, H. Shin and K. Lee

KAIST, Korea

 

9:35

5-2

Drift-Diffusion-Based Modeling of the Non-Quasistatic Small-Signal Response for RF-MOSFET Applications

S. Jinbou, H. Ueno, H. Kawano, K. Morikawa, N. Nakayama,

M. Miura-Mattausch and H.J. Mattausch

Hiroshima Univ., Japan

 

9:55

5-3

The Physical Phenomena Responsible for Excess Noise in Short-Channel MOS Devices

R. Navid and R.W. Dutton

Stanford Univ., USA

 

10:15

5-4

Simulation of Substrate Currents

W. Schoenmaker, P. Meuris, W. Magnus and B. Maleszka

IMEC, Belgium

 

10:35              Break

 

Session 6:           Atomistic Modeling and Fluctuation Simulation

                                 (Intl. Conference Hall)

Chairpersons:              M. Hane, NEC

                                  S. Dunham, Univ. of Washington

 

10:50

6-1

Multiscale Simulation of Diffusion, Deactivation, and Segregation of

Dopants - Ab-Initio to Continuum (Invited)

W. Windl

Ohio State Univ., USA

 

11:25

6-2

Integrated Atomistic Process and Device Simulation of Decananometre MOSFETs

A. Asenov, M. Jaraiz*, S. Roy, G. Roy, F. Adamu-Lema,

A.R. Brown, V. Moroz** and R. Gafiteanu**

Univ. of Glasgow, UK, *Univ. de Valladolid, Spain and

**Avant!, USA

 

11:45

6-3

3D MOSFET Simulation Considering Long-Range Coulomb Potential Effects for Analyzing Statistical Dopant-Induced Fluctuations Associated with Atomistic Process Simulator

T. Ezaki, T. Ikezawa, A. Notsu, K. Tanaka and M. Hane

NEC, Japan

 

12:05

6-4

Transistor Width Dependence of LER Degradation to CMOS Device Characteristics

J. Wu, J. Chen and K. Liu

Texas Instruments, USA

 

12:25              Lunch

 

Session 7:           Numerics and Algorithm (Intl. Conference Hall)

Chairpersons:              M. Kimura, Sony

                                  P. Leon, Mixed Technology Associates

 

13:40

7-1

Enhanced Advancing Front Delaunay Meshing in TCAD

P. Fleischmann and S. Selberherr

Technical Univ. Vienna, Austria

 

14:00

7-2

In-Advance CPU Time Analysis for Monte Carlo Device Simulations

C. Jungemann and B. Meinerzhagen

Univ. of Bremen, Germany

 

14:20

7-3

An Efficient Algorithm for 3D Interconnect Capacitance Extraction Considering Floating Conductors

O. Cueto, F. Charlet and A. Farcy*

CEA and *STMicroelectronics, France

 

14:40              Break

 

Session 8:           MEMS and ESD (Intl. Conference Hall)

Chairpersons:              T. Toyabe, Toyo Univ.

                                  W. Schoenmaker, IMEC

 

14:55

8-1

System Level Model of Damping Effects for Highly Perforated Torsional Structures

G. Schrag, R. Sattler and G. Wachutka

Munich Univ. of Technol., Germany

 

15:15

8-2

A Novel CDM-Like Discharge Effect During Human Body Model (HBM) ESD Stress

V. Axelrad, Y. Huh*, J.W. Chen* and P. Bendix*

Sequoia Design Systems and *LSI Logic, USA

 

15:35

8-3

Simulation Technique of Heating by Contact Resistance for ESD Protection Device

K. Matsuzawa, H. Kawashima, T. Matsuhashi and S. Yasuda

Toshiba, Japan

 

16:15-18:15           Poster Session (Room 401, 4F)

 

P-1                       Atomistic Simulation of RTA Annealing for Shallow

                            Junction Formation Characterizing both BED and TED

                           M. Yu, R. Huang, X. Zhang, Y. Wang and H. Oka*

                            Peking Univ., China and *Fujitsu Labs., Japan

 

P-2                       Direct Tunneling Gate Current in Deep Sub-Micron

                            MOSFETs in the Presence of Inelastic Scattering

                            A. Haque, K. Alam and S. Zaman

                            Bangladesh Univ. of Eng. and Technol., Bangladesh

 

P-3                       Three-Dimensional Triangle-Based Simulation of Etching Processes

                            O. Lenhart and E. Bar

                            Fraunhofer Inst. of Integrated Circuits, Germany

 

P-4                       Automatic Order Reduction of Thermo-Electric Model for

                            Microthrusters Ignition Unit

                            T. Bechtold, E.B. Rudnyi and J.G. Korvink

                            Univ. of Freiburg, Germany

 

P-5                       Numerical Modeling of Silicon Film Deposition in Very-

                            High-Frequency Plasma Reactor

                            K. Satake, Y. Kobayashi and S. Morita

                    &nbs